Fluid Dynamic Drive Module for Planar Motion in Three Degrees of Freedom

Aiming to reduce the size of machine tools for micro production significantly, an innovative planar drive has been developed. It generates forces and torque by fluid jets impinging on drive profiles. This work shows the evolution of the drive. Starting from theoretical considerations regarding the fluid dynamic working principle, a linear actuator was implemented. Then four linear actuators were fused in one slide to form a XY-motion stage. Modifications of the drive principle allowed to extend the movement capacity to unrestrained rotations. In addition to the air powered prototypes, a design for liquid media was tested.