Compact XYC-table fluid planar drive system for micro milling

In this paper, a compact XYC-table design for the manufacturing of micro parts is presented. The drive principle is based on the selective control of different air nozzles, whose fluid jets generate feed forces for planar motion. In combination with an aerostatic contactless guide and the according control system, very precise motion was achieved in an experimental test setup. Further investigations demonstrate the extension of the current system by an additional rotational degree of freedom.