ForschungPublikationen
Analysis of an ultra-precision positioning system and parametrization of its structural model for error compensation

Analysis of an ultra-precision positioning system and parametrization of its structural model for error compensation

Kategorien Konferenz (reviewed)
Jahr 2017
Autoren Denkena, B., Dahlmann, D., Sassi, N.:
Veröffentlicht in 10th CIRP Conference on Intelligent Computation in Manufacturing Engineering - CIRP ICME '16, Procedia CIRP 62 (2017), S. 335 - 339.
Beschreibung

Conventional compensation of position errors of machine tools relies only on measured values. Due to this principle it is not always possible to compensate the errors in time, especially dynamic ones. Moreover, the relevant control variables cannot always be measured directly. Thus, this approach proves to be insufficient for high precision applications. In this context, a model-based error prediction allows for minimal position errors. However, ultra-precision applications set high demands for the models’ accuracy. This paper presents the design of an accurate
and real time-capable structural model of an ultra-precision positioning system. The modeling method for the developed ultra-precision demonstrator is shown and the initial parameter identification is presented.

DOI 10.1016/j.procir.2016.06.054