Control system for an ultra‐precision electromagnetic linear guide

Up to the present, ultra‐precision machining is characterised by low productivity caused by limited feed rates and time‐consuming tool and workpiece setup. In order to improve the productivity of precision machining operations, a novel electromagnetic linear guide is developed. This paper presents the control structure for the newly developed electromagnetic guide for use in ultraprecision machining. A state space controller based on Kalman filtering is implemented to achieve a decoupled control of the magnetically levitated slide’s five degrees of freedom. Simulation of the feedback control system is performed to verify the function of the state space controller and determine the stiffness of the guide system.