High-Performance Cutting of Micro Patterns

This research report presents an innovative piezo-actuated fast tool servo (FTS) for milling operations introducing the high performance cutting of micro patterns. The outstanding dynamics of the tool enable a highly dynamic depth of cut variation during the cutting process. Unlike commercial technologies, such as ultrasonic tools, the presented device does not oscillate in resonance, but controlled. Its first natural resonance frequency of ω0 > 4.5 kHz and its capability to provide a maximum amplitude of Δlmax > 30 microns establish the basis to cut micro patterns, while using process parameters applied in real-life industrial processes.