Active Guides for Precision Micro-systems

Active Guides for Precision Micro-systems

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren Denkena, B., Möhring, H.-C., Kayapinar, H.:
Veröffentlicht in Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), 23rd May - 27th May 2011, Lake Como, Italy, S. 117-120.

In order to enable high precision motion in micro-systems, the application of active aerostatic as well as electromagnetic guides is presented in this paper. Both concepts have in common, that they prevent contact between the moving slide and the system’s frame and allow precision movements at drive forces below 1 mN. In order to compensate for tilting and vertical displacement of the slide, an accurate air gap measurement system has to be developed and integrated in a highly limited installation space.