ForschungPublikationen
Design, Fabrication, and Calibration of Capacitive Air Gap Sensors for the Application in Levitation based Guides in Microactuators.

Design, Fabrication, and Calibration of Capacitive Air Gap Sensors for the Application in Levitation based Guides in Microactuators.

Kategorien Konferenz (reviewed)
Jahr 2009
Autoren Denkena, B., Kayapinar, H., Gatzen, H.-H., Pape, F.:
Veröffentlicht in IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand, S. 1915-1918.