ForschungPublikationen
Active linear guidances for micro actuators: alternative concepts and first prototypes.

Active linear guidances for micro actuators: alternative concepts and first prototypes.

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2008
Autoren Denkena, B., Brehmeier, S., Möhring, H.-C.:
Veröffentlicht in Microsystem Technologies, Vol. 14 (2008) No. 12, S. 1961-1973.