An Aerostatic Linear Guidance for Microsystems.

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2004
Autoren Denkena, B., Li, J., Kopp, D.:
Veröffentlicht in Annals of the German Academic Society for Production Engineering (WGP), Production Engineering, Vol. XI (2004) No. 2, S. 203-208.