Multi-Scale Positioning Control Model of a Novel Fluid Dynamic Drive by Coupling Process and Adapted CFD Models

In this paper multi-scale modeling of a novel fluid dynamic planar positioning system is described and compared with a simplified plant model. The multi-scale model is realized by coupling a mechatronic simulation model implemented in Matlab/Simulink and a transient 2D-CFD model realized with the Finite Element-software Ansys using the Flotran solver. The complex behavior of the fluidic system between two control tasks could be observed. The permission for large movements of the slide is solved using an appropriate remeshing concept.