Design of a Compact Fluidic XY-Stage for Precise Positioning

A novel drive principle was presented in this work basing on the impulse force of fluid jets impinging certain profiles. The force characteristics and positioning capabilities of the presented drive far below 1 μm were demonstrated using a linear prototype. The goal of this project is a planar positioning device guided contactless on aerostatic bearings. The concept of the XY-stage, details of the design, expected challenges as well as solution proposals were discussed. In near future the XY-stage will be constructed and characterized. Furthermore, integration with other components into a desktop machine prototype is planned.