Ascertainability of Coated Micro Patterns.

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren Denkena, B., Breidenstein, B., Mörke, T., Ostermann, J., Dragon, R.:
Veröffentlicht in Proceedings of the 9th International Conference THE "A" Coatings in Manufacturing Engineering, 3-5 October, 2011, Thessaloniki, Greece, S. 19-26.