Design, Fabrication, and Calibration of Capacitive Air Gap Sensors for the Application in Levitation based Guides in Microactuators.
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2009 |
| Autoren | Denkena, B., Kayapinar, H., Gatzen, H.-H., Pape, F.: |
| Veröffentlicht in | IEEE Sensors 2009 Conference, 25-28 October 2009, Christchurch, New Zealand, S. 1915-1918. |
