ForschungPublications
Observations on Polishing and Ultra-Precision Machining of Semiconductor Substrate Materials.

Observations on Polishing and Ultra-Precision Machining of Semiconductor Substrate Materials.

Categories Zeitschriften/Aufsätze (reviewed)
Year 1995
Authors Tönshoff, H.K., Venkatesh, V.C., Inasaki, I., Nakagawa, T., Marinescu, I.D.:
Published In CIRP Annals, Vol. 44 (1995) 2, S. 611-618.