ForschungPublications
An Aerostatic Linear Guidance for Microsystems.

An Aerostatic Linear Guidance for Microsystems.

Categories Zeitschriften/Aufsätze (reviewed)
Year 2004
Authors Denkena, B., Li, J., Kopp, D.:
Published In Annals of the German Academic Society for Production Engineering (WGP), Production Engineering, Vol. XI (2004) No. 2, S. 203-208.