Observations on Polishing and Ultra-Precision Machining of Semiconductor Substrate Materials.
| Categories |
Zeitschriften/Aufsätze (reviewed) |
| Year | 1995 |
| Authors | Tönshoff, H.K., Venkatesh, V.C., Inasaki, I., Nakagawa, T., Marinescu, I.D.: |
| Published in | CIRP Annals, Vol. 44 (1995) 2, S. 611-618. |
