Micromachining Using Excimer Lasers.
| Categories |
Zeitschriften/Aufsätze (reviewed) |
| Year | 1993 |
| Authors | Tönshoff, H.K., Hesse, D., Mommsen, J.: |
| Published in | CIRP Annals - Manufacturing Technology, Vol. 42 (1993) 1, S. 247-251. |
