An Aerostatic Linear Guidance for Microsystems.
Categories |
Zeitschriften/Aufsätze (reviewed) |
Year | 2004 |
Authors | Denkena, B., Li, J., Kopp, D.: |
Published in | Annals of the German Academic Society for Production Engineering (WGP), Production Engineering, Vol. XI (2004) No. 2, S. 203-208. |