At the heart of the developed system are double-acting ultrasonic actuators that generate a stable air film by means of high-frequency vibration excitation. This allows the actuator to float contactlessly in the Z direction. Lateral stabilisation is provided by a ring-shaped magnetic actuator, which precisely aligns the levitation and specifically braces the system by means of actively controlled reluctance forces. The result is a guidance concept that is frictionless, media-free and highly rigid.
The symmetrical design of the actuators ensures even load distribution and makes the system robust against vibrations and external disturbances. An integrated infrared pyrometer monitors the temperature and thermal influences are compensated by an algorithm. The prototype developed is based on three identical hybrid actuators and enables movements in three degrees of freedom – including adjustable levitation height and actively controlled tilt angles. Measurement data confirms a reliable positioning accuracy of at least 1 µm.
For companies, this technology opens up new avenues for durable, highly dynamic and extremely precise machines. The completely contactless mode of operation reduces wear, increases stability and thus creates a promising basis for the next generation of precision machines in microproduction technology.
Contact:
For further information, please contact Chenglong Ding on +49 511 762 18338 or by email at ding@ifw-uni-hannover.de.
