Novel Piezo-Hydraulic Micro-Positioning System to Accomplish Precise Positioning Challenges

This paper presents the experimental investigation of a novel micro-positioning system for implementation in machine tools. The bidirectional piezo-hydraulic micro pump with integrated fast-switching valves represents the actuation unit of an active fixing plate. For prototypic realization of the pump-module firstly modular design and precise assembling strategy are demanded. Secondly, the synchronized timing of piezoelectric pumping and valve actuators has to be established. In this regard, an advanced objective is the development of an optimized actuation strategy for piezo-driven valves. It is supposed to provide the use of maximum drive dynamic while bounce protection of the valve ball is guaranteed. Wide studies have been carried out to define the pressure dependent efficiency characteristics of the actuation unit.