Microstructuring with Excimer Lasers and Reduction of Deposited Ablation Products using a Special Gas Nozzle with a Vacuum System.
| Kategorien |
Konferenz |
| Jahr | 1994 |
| Autorinnen/Autoren | Tönshoff, H.K., Hesse, D., Gonschior, M.: |
| Veröffentlicht in | ICALEO '94, 13th. Intern. Congress on Applications of Lasers and Electro-Optics, 17.-20. Oct., Orlando, Florida. |
