Denkena, B., Dahlmann, D., Krüger, R.:
|Titel:||Experimental investigation of an electromagnetic linear guide for ultra‐precision high performance machining|
|Stichworte:||Active magnetic guide, motion control, ultra‐precision machining|
Machine tools for ultra‐precision cutting are specifically designed to achieve the highest degree of working accuracy. In fact, this is often accomplished at the expense of machining speed and productivity. In order to increase the overall machining performance while maintaining the required position accuracy, a novel electromagnetic ultra‐precision linear guide is developed. This paper presents the first experimental investigation of the electromagnetic guide for use in ultra‐precision cutting with increased machining performance. The guiding system’s mechanical setup and control environment as well as its implementation in a highprecision cross table are briefly introduced. Initially, the positioning capability of the electromagnetic actuators is investigated. Then, the functionality of the active magnetic guide is verified via decoupled control of the slide’s five degrees of freedom. Following the commissioning, the electromagnetic guide demonstrates a submicrometre positioning accuracy.