A novel fluid-dynamic drive principle for desktop machines

A compact contactless planar positioning stage is introduced which is based on a new fluid-dynamic drive principle. A defined thrust force generation is obtained by the controlled injection of free fluid jets on periodic structures that are part of the slide. Aerostatic bearings ensure a constant air gap independent of the load case. Following the background and goals of the project, the operating principle is explained. The design of a first linear prototype is supported by analytic and numerical analyses (CFD). Experimental results show a high capability for precision applications. Finally, a concept for a planar stage is introduced.