Active linear guidances for micro actuators: alternative concepts and first prototypes.
| Categories |
Zeitschriften/Aufsätze (reviewed) |
| Year | 2008 |
| Authors | Denkena, B., Brehmeier, S., Möhring, H.-C.: |
| Published in | Microsystem Technologies, Vol. 14 (2008) No. 12, S. 1961-1973. |
